Recrystallized parylene as a mask for silicon chemical etching

This paper presents the first use of recrystallized parylene as masking material for silicon chemical etch. Recrystallized parylene was obtained by melting parylene C at 350°C for 2 hours. The masking ability of recrystallized parylene was tested in HNA (hydrofluoric acid, nitric acid and acetic acid) solution of various ratios, KOH (potassium hydroxide) solution and TMAH (tetramethylammonium hydroxide) at different temperatures and concentrations. It is found that interface between parylene and the substrate can be attacked, which results in undercuts. Otherwise, recrystallized parylene exhibited good adhesion to silicon, complete protection of unexposed silicon and silicon etching rates comparable to literature data

Q-enhanced fold-and-bond MEMS inductors

This work presents a novel coil fabrication technology to enhance quality factor (Q factor) of microfabricated inductors for implanted medical wireless sensing and data/power transfer applications. Using parylene as a flexible thin-film device substrate, a post-microfabrication substrate folding-and-bonding method is developed to effectively increase the metal thickness of the surface-micromachined inductors, resulting in their lower self-resistance so their higher quality factor. One-fold-and-bond coils are successfully demonstrated as an example to verify the feasibility of the fabrication technology with measurement results in good agreements with device simulation. Depending on target specifications, multiple substrate folding-and-bonding can be extensively implemented to facilitate further improved electrical characteristics of the coils from single fabrication batch. Such Q-enhanced inductors can be broadly utilized with great potentials in flexible integrated wireless devices/systems for intraocular prostheses and other biomedical implants

Numerical analysis and design strategy for field emission devices

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.Includes bibliographical references (p. 165-172).by Yao-Joe Yang.Ph.D

Evaluation of information technology investment: a data envelopment analysis approach

Abstract The increasing use of information technology (IT) has resulted in a need for evaluating the productivity impacts of IT. The contemporary IT evaluation approach has focused on return on investment and return on management. IT investment has impacts on different stages of business operations. For example, in the banking industry, IT plays a key role in effectively generating (i) funds from the customer in the forms of deposits and then (ii) profits by using deposits as investment funds. Existing approaches based upon data envelopment analysis (DEA) only measure the IT efficiency or impact on one specific stage when a multi-stage business process is present. A detailed model is needed to characterize the impact of IT on each stage of the business operation. The current paper develops a DEA non-linear programming model to evaluate the impact of IT on multiple stages along with information on how to distribute the IT-related resources so that the efficiency is maximized. It is shown that this non-linear program can be treated as a parametric linear program. It is also shown that if there is only one intermediate measure, then the non-linear DEA model becomes a linear program. Our approach is illustrated with an example taken from previous studies.

Sea-Urchin-Like ZnO Nanoparticle Film for Dye-Sensitized Solar Cells

We present novel sea-urchin-like ZnO nanoparticles synthesized using a chemical solution method. Solution approaches to synthesizing ZnO nanostructures have several advantages including low growth temperatures and high potential for scaling up. We investigated the influence of reaction times on the thickness and morphology of sea-urchin-like ZnO nanoparticles, and XRD patterns show strong intensity in every direction. Dye-sensitized solar cells (DSSCs) were developed using the synthesized ZnO nanostructures as photoanodes. The DSSCs comprised a fluorine-doped tin oxide (FTO) glass with dense ZnO nanostructures as the working electrode, a platinized FTO glass as the counter electrode, N719-based dye, and I-/I3-liquid electrolyte. The DSSC fabricated using such nanostructures yielded a high power conversion efficiency of 1.16% with an incident photo-to-current efficiency (IPCE) as high as 15.32%. Electrochemical impedance spectroscopy was applied to investigate the characteristics of DSSCs. An improvement in the electron transport in the ZnO photoanode was also observed

A Polymer-Based Capacitive Sensing Array for Normal and Shear Force Measurement

In this work, we present the development of a polymer-based capacitive sensing array. The proposed device is capable of measuring normal and shear forces, and can be easily realized by using micromachining techniques and flexible printed circuit board (FPCB) technologies. The sensing array consists of a polydimethlysiloxane (PDMS) structure and a FPCB. Each shear sensing element comprises four capacitive sensing cells arranged in a 2 × 2 array, and each capacitive sensing cell has two sensing electrodes and a common floating electrode. The sensing electrodes as well as the metal interconnect for signal scanning are implemented on the FPCB, while the floating electrodes are patterned on the PDMS structure. This design can effectively reduce the complexity of the capacitive structures, and thus makes the device highly manufacturable. The characteristics of the devices with different dimensions were measured and discussed. A scanning circuit was also designed and implemented. The measured maximum sensitivity is 1.67%/mN. The minimum resolvable force is 26 mN measured by the scanning circuit. The capacitance distributions induced by normal and shear forces were also successfully captured by the sensing array

Flexible Temperature Sensor Array Based on a Graphite-Polydimethylsiloxane Composite

This paper presents a novel method to fabricate temperature sensor arrays by dispensing a graphite-polydimethylsiloxane composite on flexible polyimide films. The fabricated temperature sensor array has 64 sensing cells in a 4 × 4 cm2 area. The sensor array can be used as humanoid artificial skin for sensation system of robots. Interdigitated copper electrodes were patterned on the flexible polyimide substrate for determining the resistivity change of the composites subjected to ambient temperature variations. Polydimethylsiloxane was used as the matrix. Composites of different graphite volume fractions for large dynamic range from 30 °C to 110 °C have been investigated. Our experiments showed that graphite powder provided the composite high temperature sensitivity. The fabricated temperature sensor array has been tested. The detected temperature contours are in good agreement with the shapes and magnitudes of different heat sources

Atomic Layer Deposition of 2D Metal Dichalcogenides for Electronics, Catalysis, Energy Storage, and Beyond

2D transition metal dichalcogenides (TMDCs) are among the most exciting materials of today. Their layered crystal structures result in unique and useful electronic, optical, catalytic, and quantum properties. To realize the technological potential of TMDCs, methods depositing uniform films of controlled thickness at low temperatures in a highly controllable, scalable, and repeatable manner are needed. Atomic layer deposition (ALD) is a chemical gas-phase thin film deposition method capable of meeting these challenges. In this review, the applications evaluated for ALD TMDCs are systematically examined, including electronics and optoelectonics, electrocatalysis and photocatalysis, energy storage, lubrication, plasmonics, solar cells, and photonics. This review focuses on understanding the interplay between ALD precursors and deposition conditions, the resulting film characteristics such as thickness, crystallinity, and morphology, and ultimately device performance. Through rational choice of precursors and conditions, ALD is observed to exhibit potential to meet the varying requirements of widely different applications. Beyond the current state of ALD TMDCs, the future prospects, opportunities, and challenges in different applications are discussed. The authors hope that the review aids in bringing together experts in the fields of ALD, TMDCs, and various applications to eventually realize industrial applications of ALD TMDCs.Peer reviewe

Robust estimation of bacterial cell count from optical density

Optical density (OD) is widely used to estimate the density of cells in liquid culture, but cannot be compared between instruments without a standardized calibration protocol and is challenging to relate to actual cell count. We address this with an interlaboratory study comparing three simple, low-cost, and highly accessible OD calibration protocols across 244 laboratories, applied to eight strains of constitutive GFP-expressing E. coli. Based on our results, we recommend calibrating OD to estimated cell count using serial dilution of silica microspheres, which produces highly precise calibration (95.5% of residuals <1.2-fold), is easily assessed for quality control, also assesses instrument effective linear range, and can be combined with fluorescence calibration to obtain units of Molecules of Equivalent Fluorescein (MEFL) per cell, allowing direct comparison and data fusion with flow cytometry measurements: in our study, fluorescence per cell measurements showed only a 1.07-fold mean difference between plate reader and flow cytometry data

Rare and low-frequency coding variants alter human adult height

Height is a highly heritable, classic polygenic trait with ~700 common associated variants identified so far through genome - wide association studies . Here , we report 83 height - associated coding variants with lower minor allele frequenc ies ( range of 0.1 - 4.8% ) and effects of up to 2 16 cm /allele ( e.g. in IHH , STC2 , AR and CRISPLD2 ) , >10 times the average effect of common variants . In functional follow - up studies, rare height - increasing alleles of STC2 (+1 - 2 cm/allele) compromise d proteolytic inhibition of PAPP - A and increased cleavage of IGFBP - 4 in vitro , resulting in higher bioavailability of insulin - like growth factors . The se 83 height - associated variants overlap genes mutated in monogenic growth disorders and highlight new biological candidates ( e.g. ADAMTS3, IL11RA, NOX4 ) and pathways ( e.g . proteoglycan/ glycosaminoglycan synthesis ) involved in growth . Our results demonstrate that sufficiently large sample sizes can uncover rare and low - frequency variants of moderate to large effect associated with polygenic human phenotypes , and that these variants implicate relevant genes and pathways